Organization record
AMTECH SYSTEMS, INC.
All evidence-backed facts for this organization, identity resolved across official registers.
Facts on record
Newest first; every row links to its evidence page.
| Fact | Value | Period | Source |
|---|---|---|---|
| accounts_payable | {"amount": 10350000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2026-06-30 | sec_edgar |
| accounts_payable | {"amount": 9749000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2026-03-31 | sec_edgar |
| accounts_payable | {"amount": 7974000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2025-12-31 | sec_edgar |
| accounts_payable | {"amount": 7735000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2025-09-30 | sec_edgar |
| accounts_payable | {"amount": 6899000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2025-06-30 | sec_edgar |
| accounts_payable | {"amount": 5201000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2025-03-31 | sec_edgar |
| accounts_payable | {"amount": 6888000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2024-12-31 | sec_edgar |
| accounts_payable | {"amount": 5356000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2024-09-30 | sec_edgar |
| accounts_payable | {"amount": 8330000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2024-06-30 | sec_edgar |
| accounts_payable | {"amount": 6741000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2024-03-31 | sec_edgar |
| accounts_payable | {"amount": 8545000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2023-12-31 | sec_edgar |
| accounts_payable | {"amount": 10815000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2023-09-30 | sec_edgar |
| accounts_payable | {"amount": 7466000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2023-06-30 | sec_edgar |
| accounts_payable | {"amount": 7556000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2023-03-31 | sec_edgar |
| accounts_payable | {"amount": 6835000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2022-12-31 | sec_edgar |
| accounts_payable | {"amount": 7301000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2022-09-30 | sec_edgar |
| accounts_payable | {"amount": 9831000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2022-06-30 | sec_edgar |
| accounts_payable | {"amount": 9635000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2022-03-31 | sec_edgar |
| accounts_payable | {"amount": 10227000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2021-12-31 | sec_edgar |
| accounts_payable | {"amount": 8229000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2021-09-30 | sec_edgar |
| accounts_payable | {"amount": 8571000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2021-06-30 | sec_edgar |
| accounts_payable | {"amount": 5878000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2021-03-31 | sec_edgar |
| accounts_payable | {"amount": 3414000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2020-12-31 | sec_edgar |
| accounts_payable | {"amount": 2676000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2020-09-30 | sec_edgar |
| accounts_payable | {"amount": 3933000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2020-06-30 | sec_edgar |
| accounts_payable | {"amount": 4447000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2020-03-31 | sec_edgar |
| accounts_payable | {"amount": 5097000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2019-12-31 | sec_edgar |
| accounts_payable | {"amount": 4371000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2019-09-30 | sec_edgar |
| accounts_payable | {"amount": 4914000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2019-06-30 | sec_edgar |
| accounts_payable | {"amount": 6128000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2019-03-31 | sec_edgar |
| accounts_payable | {"amount": 11828000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2018-12-31 | sec_edgar |
| accounts_payable | {"amount": 6867000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2018-09-30 | sec_edgar |
| accounts_payable | {"amount": 12579000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2018-06-30 | sec_edgar |
| accounts_payable | {"amount": 19129000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2018-03-31 | sec_edgar |
| accounts_payable | {"amount": 20483000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2017-12-31 | sec_edgar |
| accounts_payable | {"amount": 21555000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2017-09-30 | sec_edgar |
| accounts_payable | {"amount": 22484000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2017-06-30 | sec_edgar |
| accounts_payable | {"amount": 16850000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2017-03-31 | sec_edgar |
| accounts_payable | {"amount": 14986000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2016-12-31 | sec_edgar |
| accounts_payable | {"amount": 15397000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2016-09-30 | sec_edgar |
| accounts_payable | {"amount": 18411000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2016-06-30 | sec_edgar |
| accounts_payable | {"amount": 15021000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2016-03-31 | sec_edgar |
| accounts_payable | {"amount": 10582000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2015-12-31 | sec_edgar |
| accounts_payable | {"amount": 15646000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2015-09-30 | sec_edgar |
| accounts_payable | {"amount": 19853000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2015-06-30 | sec_edgar |
| accounts_payable | {"amount": 22517000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2015-03-31 | sec_edgar |
| accounts_payable | {"amount": 8041000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2014-12-31 | sec_edgar |
| accounts_payable | {"amount": 6003000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2014-09-30 | sec_edgar |
| accounts_payable | {"amount": 7028000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2014-06-30 | sec_edgar |
| accounts_payable | {"amount": 5992000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2014-03-31 | sec_edgar |
| accounts_payable | {"amount": 5299000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2013-12-31 | sec_edgar |
| accounts_payable | {"amount": 5472000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2013-09-30 | sec_edgar |
| accounts_payable | {"amount": 2767000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2013-06-30 | sec_edgar |
| accounts_payable | {"amount": 3044000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2013-03-31 | sec_edgar |
| accounts_payable | {"amount": 2729000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2012-12-31 | sec_edgar |
| accounts_payable | {"amount": 5780000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2012-09-30 | sec_edgar |
| accounts_payable | {"amount": 6024000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2012-06-30 | sec_edgar |
| accounts_payable | {"amount": 6733000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2012-03-31 | sec_edgar |
| accounts_payable | {"amount": 6510000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2011-12-31 | sec_edgar |
| accounts_payable | {"amount": 8928000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2011-09-30 | sec_edgar |
| accounts_payable | {"amount": 19601000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2011-06-30 | sec_edgar |
| accounts_payable | {"amount": 12446000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2010-09-30 | sec_edgar |
| accounts_receivable | {"amount": 19712000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2026-06-30 | sec_edgar |
| accounts_receivable | {"amount": 18933000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2026-03-31 | sec_edgar |
| accounts_receivable | {"amount": 17287000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2025-12-31 | sec_edgar |
| accounts_receivable | {"amount": 19878000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2025-09-30 | sec_edgar |
| accounts_receivable | {"amount": 19047000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2025-06-30 | sec_edgar |
| accounts_receivable | {"amount": 16190000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2025-03-31 | sec_edgar |
| accounts_receivable | {"amount": 20822000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2024-12-31 | sec_edgar |
| accounts_receivable | {"amount": 21989000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2024-09-30 | sec_edgar |
| accounts_receivable | {"amount": 24292000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2024-06-30 | sec_edgar |
| accounts_receivable | {"amount": 21230000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2024-03-31 | sec_edgar |
| accounts_receivable | {"amount": 21403000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2023-12-31 | sec_edgar |
| accounts_receivable | {"amount": 26474000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2023-09-30 | sec_edgar |
| accounts_receivable | {"amount": 28398000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2023-06-30 | sec_edgar |
| accounts_receivable | {"amount": 29427000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2023-03-31 | sec_edgar |
| accounts_receivable | {"amount": 21785000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2022-12-31 | sec_edgar |
| accounts_receivable | {"amount": 25000000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2022-09-30 | sec_edgar |
| accounts_receivable | {"amount": 20779000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2022-06-30 | sec_edgar |
| accounts_receivable | {"amount": 30782000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2022-03-31 | sec_edgar |
| accounts_receivable | {"amount": 25204000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2021-12-31 | sec_edgar |
| accounts_receivable | {"amount": 22500000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2021-09-30 | sec_edgar |
| accounts_receivable | {"amount": 20893000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2021-06-30 | sec_edgar |
| accounts_receivable | {"amount": 16980000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2021-03-31 | sec_edgar |
| accounts_receivable | {"amount": 13940000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2020-12-31 | sec_edgar |
| accounts_receivable | {"amount": 11200000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2020-09-30 | sec_edgar |
| accounts_receivable | {"amount": 10297000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2020-06-30 | sec_edgar |
| accounts_receivable | {"amount": 11285000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2020-03-31 | sec_edgar |
| accounts_receivable | {"amount": 14205000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-12-31 | sec_edgar |
| accounts_receivable | {"amount": 12873000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-09-30 | sec_edgar |
| accounts_receivable | {"amount": 15488000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-06-30 | sec_edgar |
| accounts_receivable | {"amount": 17093000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-03-31 | sec_edgar |
| accounts_receivable | {"amount": 23137000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-12-31 | sec_edgar |
| accounts_receivable | {"amount": 17985000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-09-30 | sec_edgar |
| accounts_receivable | {"amount": 27627000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-06-30 | sec_edgar |
| accounts_receivable | {"amount": 22719000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-03-31 | sec_edgar |
| accounts_receivable | {"amount": 24365000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-12-31 | sec_edgar |
| accounts_receivable | {"amount": 22519000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-09-30 | sec_edgar |
| accounts_receivable | {"amount": 24685000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-06-30 | sec_edgar |
| accounts_receivable | {"amount": 19484000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-03-31 | sec_edgar |
| accounts_receivable | {"amount": 23146000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-12-31 | sec_edgar |
| accounts_receivable | {"amount": 17642000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-09-30 | sec_edgar |
| accounts_receivable | {"amount": 18344000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-06-30 | sec_edgar |
| accounts_receivable | {"amount": 16641000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-03-31 | sec_edgar |
| accounts_receivable | {"amount": 16063000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-12-31 | sec_edgar |
| accounts_receivable | {"amount": 14488000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-09-30 | sec_edgar |
| accounts_receivable | {"amount": 19559000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-06-30 | sec_edgar |
| accounts_receivable | {"amount": 17312000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-03-31 | sec_edgar |
| accounts_receivable | {"amount": 5421000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-12-31 | sec_edgar |
| accounts_receivable | {"amount": 8896000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-09-30 | sec_edgar |
| accounts_receivable | {"amount": 7466000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-06-30 | sec_edgar |
| accounts_receivable | {"amount": 7381000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-03-31 | sec_edgar |
| accounts_receivable | {"amount": 10496000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-12-31 | sec_edgar |
| accounts_receivable | {"amount": 4829000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-09-30 | sec_edgar |
| accounts_receivable | {"amount": 7333000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-06-30 | sec_edgar |
| accounts_receivable | {"amount": 7213000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-03-31 | sec_edgar |
| accounts_receivable | {"amount": 5824000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-12-31 | sec_edgar |
| accounts_receivable | {"amount": 7486000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-09-30 | sec_edgar |
| accounts_receivable | {"amount": 16608000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-06-30 | sec_edgar |
| accounts_receivable | {"amount": 11290000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-03-31 | sec_edgar |
| accounts_receivable | {"amount": 10560000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-12-31 | sec_edgar |
| accounts_receivable | {"amount": 14447000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-09-30 | sec_edgar |
| accounts_receivable | {"amount": 21238000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-06-30 | sec_edgar |
| accounts_receivable | {"amount": 9252000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2010-09-30 | sec_edgar |
| capex | {"amount": 601000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2026-06-30 | sec_edgar |
| capex | {"amount": 475000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2026-03-31 | sec_edgar |
| capex | {"amount": 277000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2025-12-31 | sec_edgar |
| capex | {"amount": 950000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2025-09-30 | sec_edgar |
| capex | {"amount": 704000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2025-06-30 | sec_edgar |
| capex | {"amount": 152000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2025-03-31 | sec_edgar |
| capex | {"amount": 143000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2024-12-31 | sec_edgar |
| capex | {"amount": 4878000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2024-09-30 | sec_edgar |
| capex | {"amount": 5310000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2024-06-30 | sec_edgar |
| capex | {"amount": 1976000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2024-03-31 | sec_edgar |
| capex | {"amount": 756000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2023-12-31 | sec_edgar |
| capex | {"amount": 2898000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2023-09-30 | sec_edgar |
| capex | {"amount": 1922000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2023-06-30 | sec_edgar |
| capex | {"amount": 976000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2023-03-31 | sec_edgar |
| capex | {"amount": 224000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2022-12-31 | sec_edgar |
| capex | {"amount": 1135000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2022-09-30 | sec_edgar |
| capex | {"amount": 325000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2022-06-30 | sec_edgar |
| capex | {"amount": 125000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2022-03-31 | sec_edgar |
| capex | {"amount": 45000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curren | 2021-12-31 | sec_edgar |
| capex | {"amount": 3012000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2021-09-30 | sec_edgar |
| capex | {"amount": 790000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2021-06-30 | sec_edgar |
| capex | {"amount": 433000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2021-03-31 | sec_edgar |
| capex | {"amount": 198000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2020-12-31 | sec_edgar |
| capex | {"amount": 2676000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2020-09-30 | sec_edgar |
| capex | {"amount": 860000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2020-06-30 | sec_edgar |
| capex | {"amount": 345000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2020-03-31 | sec_edgar |
| capex | {"amount": 173000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2019-12-31 | sec_edgar |
| capex | {"amount": 714000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2019-09-30 | sec_edgar |
| capex | {"amount": 552000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2019-06-30 | sec_edgar |
| capex | {"amount": 238000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2019-03-31 | sec_edgar |
| capex | {"amount": 152000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2018-12-31 | sec_edgar |
| capex | {"amount": 1495000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2018-09-30 | sec_edgar |
| capex | {"amount": 845000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2018-06-30 | sec_edgar |
| capex | {"amount": 686000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2018-03-31 | sec_edgar |
| capex | {"amount": 93000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curren | 2017-12-31 | sec_edgar |
| capex | {"amount": 1256000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2017-09-30 | sec_edgar |
| capex | {"amount": 355000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2017-06-30 | sec_edgar |
| capex | {"amount": 210000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2017-03-31 | sec_edgar |
| capex | {"amount": 86000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curren | 2016-12-31 | sec_edgar |
| capex | {"amount": 978000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2016-09-30 | sec_edgar |
| capex | {"amount": 442000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2016-06-30 | sec_edgar |
| capex | {"amount": 192000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2016-03-31 | sec_edgar |
| capex | {"amount": 108000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2015-12-31 | sec_edgar |
| capex | {"amount": 610000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2015-09-30 | sec_edgar |
| capex | {"amount": 511000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2015-06-30 | sec_edgar |
| capex | {"amount": 125000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2015-03-31 | sec_edgar |
| capex | {"amount": 155000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2014-12-31 | sec_edgar |
| capex | {"amount": 462000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2014-09-30 | sec_edgar |
| capex | {"amount": 214000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2014-06-30 | sec_edgar |
| capex | {"amount": 214000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2014-03-31 | sec_edgar |
| capex | {"amount": 154000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2013-12-31 | sec_edgar |
| capex | {"amount": 178000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2013-09-30 | sec_edgar |
| capex | {"amount": 156000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2013-06-30 | sec_edgar |
| capex | {"amount": 162000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2013-03-31 | sec_edgar |
| capex | {"amount": 121000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2012-12-31 | sec_edgar |
| capex | {"amount": 1306000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2012-09-30 | sec_edgar |
| capex | {"amount": 1229000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2012-06-30 | sec_edgar |
| capex | {"amount": 1062000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2012-03-31 | sec_edgar |
| capex | {"amount": 465000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2011-12-31 | sec_edgar |
| capex | {"amount": 5183000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-09-30 | sec_edgar |
| capex | {"amount": 4543000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-06-30 | sec_edgar |
| capex | {"amount": 2866000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-03-31 | sec_edgar |
| capex | {"amount": 609000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2010-12-31 | sec_edgar |
| capex | {"amount": 2929000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2010-09-30 | sec_edgar |
| capex | {"amount": 3094000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2010-06-30 | sec_edgar |
| capex | {"amount": 1148000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2009-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 83109000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2026-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 24417000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2026-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 22078000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2025-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 17904000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2025-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 15563000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2025-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 13426000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2025-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 13214000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2024-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 11086000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2024-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 13183000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2024-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 13000000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2024-03-31 | sec_edgar |