FACTANKER · measured, cited, anchored official records connected

Organization record

RUDOLPH TECHNOLOGIES INC

All evidence-backed facts for this organization, identity resolved across official registers.

CIK: 0001094392Every fact source-linked

Cite: FACTANKER, https://factanker.com/entity/90d1c95b-4bbe-467e-a5a2-04b0322bfefe

Facts on record

Newest first; every row links to its evidence page.

FactValuePeriodSource
accounts_payable{"amount": 16981000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2018-12-31sec_edgar
accounts_payable{"amount": 13471000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2017-12-31sec_edgar
accounts_payable{"amount": 10245000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2016-12-31sec_edgar
accounts_payable{"amount": 9094000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2015-12-31sec_edgar
accounts_payable{"amount": 6843000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2014-12-31sec_edgar
accounts_payable{"amount": 3095000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2013-12-31sec_edgar
accounts_payable{"amount": 3932000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2012-12-31sec_edgar
accounts_payable{"amount": 4439000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2011-12-31sec_edgar
accounts_payable{"amount": 7864000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2010-12-31sec_edgar
accounts_receivable{"amount": 63337000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-09-30sec_edgar
accounts_receivable{"amount": 62142000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-06-30sec_edgar
accounts_receivable{"amount": 66357000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-03-31sec_edgar
accounts_receivable{"amount": 64194000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-12-31sec_edgar
accounts_receivable{"amount": 68512000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-09-30sec_edgar
accounts_receivable{"amount": 82555000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-06-30sec_edgar
accounts_receivable{"amount": 74672000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-03-31sec_edgar
accounts_receivable{"amount": 65283000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-12-31sec_edgar
accounts_receivable{"amount": 66188000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-09-30sec_edgar
accounts_receivable{"amount": 70564000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-06-30sec_edgar
accounts_receivable{"amount": 61002000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-03-31sec_edgar
accounts_receivable{"amount": 64912000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-12-31sec_edgar
accounts_receivable{"amount": 74884000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-09-30sec_edgar
accounts_receivable{"amount": 64576000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-06-30sec_edgar
accounts_receivable{"amount": 64747000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-03-31sec_edgar
accounts_receivable{"amount": 55492000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-12-31sec_edgar
accounts_receivable{"amount": 61339000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-09-30sec_edgar
accounts_receivable{"amount": 61185000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-06-30sec_edgar
accounts_receivable{"amount": 51801000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-03-31sec_edgar
accounts_receivable{"amount": 51603000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-12-31sec_edgar
accounts_receivable{"amount": 49969000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-09-30sec_edgar
accounts_receivable{"amount": 50811000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-06-30sec_edgar
accounts_receivable{"amount": 42547000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-03-31sec_edgar
accounts_receivable{"amount": 53437000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-12-31sec_edgar
accounts_receivable{"amount": 58733000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-09-30sec_edgar
accounts_receivable{"amount": 61065000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-06-30sec_edgar
accounts_receivable{"amount": 52683000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-03-31sec_edgar
accounts_receivable{"amount": 57113000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-12-31sec_edgar
accounts_receivable{"amount": 61306000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-09-30sec_edgar
accounts_receivable{"amount": 53174000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-06-30sec_edgar
accounts_receivable{"amount": 38665000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-03-31sec_edgar
accounts_receivable{"amount": 41036000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-12-31sec_edgar
accounts_receivable{"amount": 39664000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-09-30sec_edgar
accounts_receivable{"amount": 51240000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-06-30sec_edgar
accounts_receivable{"amount": 54257000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-03-31sec_edgar
accounts_receivable{"amount": 58814000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2010-12-31sec_edgar
capex{"amount": 4201000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2019-09-30sec_edgar
capex{"amount": 2654000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2019-06-30sec_edgar
capex{"amount": 1320000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2019-03-31sec_edgar
capex{"amount": 7542000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-12-31sec_edgar
capex{"amount": 4127000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-09-30sec_edgar
capex{"amount": 2178000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-06-30sec_edgar
capex{"amount": 1442000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-03-31sec_edgar
capex{"amount": 10210000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2017-12-31sec_edgar
capex{"amount": 7447000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-09-30sec_edgar
capex{"amount": 5301000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-06-30sec_edgar
capex{"amount": 1724000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-03-31sec_edgar
capex{"amount": 3291000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-12-31sec_edgar
capex{"amount": 2527000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-09-30sec_edgar
capex{"amount": 2173000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-06-30sec_edgar
capex{"amount": 1514000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-03-31sec_edgar
capex{"amount": 3359000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-12-31sec_edgar
capex{"amount": 2247000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-09-30sec_edgar
capex{"amount": 1744000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-06-30sec_edgar
capex{"amount": 1072000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-03-31sec_edgar
capex{"amount": 2084000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2014-12-31sec_edgar
capex{"amount": 1442000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2014-09-30sec_edgar
capex{"amount": 1020000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2014-06-30sec_edgar
capex{"amount": 390000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2014-03-31sec_edgar
capex{"amount": 4880000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2013-12-31sec_edgar
capex{"amount": 4002000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2013-09-30sec_edgar
capex{"amount": 2485000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2013-06-30sec_edgar
capex{"amount": 2528000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2013-03-31sec_edgar
capex{"amount": 2429000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2012-12-31sec_edgar
capex{"amount": 1283000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2012-09-30sec_edgar
capex{"amount": 909000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2012-06-30sec_edgar
capex{"amount": 505000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2012-03-31sec_edgar
capex{"amount": 1622000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2011-12-31sec_edgar
capex{"amount": 1366000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2011-09-30sec_edgar
capex{"amount": 1159000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2011-06-30sec_edgar
capex{"amount": 649000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2011-03-31sec_edgar
capex{"amount": 4363000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2010-12-31sec_edgar
capex{"amount": 3242000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2010-09-30sec_edgar
capex{"amount": 970000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2010-06-30sec_edgar
capex{"amount": 677000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2010-03-31sec_edgar
capex{"amount": 587000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2009-12-31sec_edgar
cash_and_equivalents{"amount": 139702000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2019-09-30sec_edgar
cash_and_equivalents{"amount": 111958000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2019-06-30sec_edgar
cash_and_equivalents{"amount": 100168000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2019-03-31sec_edgar
cash_and_equivalents{"amount": 112388000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2018-12-31sec_edgar
cash_and_equivalents{"amount": 124334000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2018-09-30sec_edgar
cash_and_equivalents{"amount": 56491000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2018-06-30sec_edgar
cash_and_equivalents{"amount": 68055000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2018-03-31sec_edgar
cash_and_equivalents{"amount": 67770000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2017-12-31sec_edgar
cash_and_equivalents{"amount": 68026000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2017-09-30sec_edgar
cash_and_equivalents{"amount": 57705000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2017-06-30sec_edgar
cash_and_equivalents{"amount": 52245000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2017-03-31sec_edgar
cash_and_equivalents{"amount": 37859000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2016-12-31sec_edgar
cash_and_equivalents{"amount": 38546000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2016-09-30sec_edgar
cash_and_equivalents{"amount": 66439000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2016-06-30sec_edgar
cash_and_equivalents{"amount": 38186000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2016-03-31sec_edgar
cash_and_equivalents{"amount": 44554000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2015-12-31sec_edgar
cash_and_equivalents{"amount": 32984000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2015-09-30sec_edgar
cash_and_equivalents{"amount": 36735000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2015-06-30sec_edgar
cash_and_equivalents{"amount": 35365000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2015-03-31sec_edgar
cash_and_equivalents{"amount": 43114000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2014-12-31sec_edgar
cash_and_equivalents{"amount": 47628000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2014-09-30sec_edgar
cash_and_equivalents{"amount": 54658000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2014-06-30sec_edgar
cash_and_equivalents{"amount": 55606000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2014-03-31sec_edgar
cash_and_equivalents{"amount": 80790000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2013-12-31sec_edgar
cash_and_equivalents{"amount": 83780000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2013-09-30sec_edgar
cash_and_equivalents{"amount": 66792000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2013-06-30sec_edgar
cash_and_equivalents{"amount": 85053000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2013-03-31sec_edgar
cash_and_equivalents{"amount": 104253000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2012-12-31sec_edgar
cash_and_equivalents{"amount": 105416000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2012-09-30sec_edgar
cash_and_equivalents{"amount": 90020000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2012-06-30sec_edgar
cash_and_equivalents{"amount": 89002000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2012-03-31sec_edgar
cash_and_equivalents{"amount": 96671000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2011-12-31sec_edgar
cash_and_equivalents{"amount": 133114000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc2011-09-30sec_edgar
cash_and_equivalents{"amount": 88730000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2011-06-30sec_edgar
cash_and_equivalents{"amount": 81127000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2011-03-31sec_edgar
cash_and_equivalents{"amount": 71120000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2010-12-31sec_edgar
cash_and_equivalents{"amount": 71922000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2010-09-30sec_edgar
cash_and_equivalents{"amount": 66120000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2010-06-30sec_edgar
cash_and_equivalents{"amount": 57715000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2010-03-31sec_edgar
cash_and_equivalents{"amount": 57839000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2009-12-31sec_edgar
cash_and_equivalents{"amount": 67735000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency2008-12-31sec_edgar
cash_and_restricted_cash{"amount": 139702000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa2019-09-30sec_edgar
cash_and_restricted_cash{"amount": 112388000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa2018-12-31sec_edgar
cash_and_restricted_cash{"amount": 124334000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa2018-09-30sec_edgar
cash_and_restricted_cash{"amount": 67770000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCas2017-12-31sec_edgar
cashflow_financing{"amount": -2332000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2019-09-30sec_edgar
cashflow_financing{"amount": -2454000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2019-06-30sec_edgar
cashflow_financing{"amount": -1342000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2019-03-31sec_edgar
cashflow_financing{"amount": -23909000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2018-12-31sec_edgar
cashflow_financing{"amount": -1585000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2018-09-30sec_edgar
cashflow_financing{"amount": -1544000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2018-06-30sec_edgar
cashflow_financing{"amount": -717000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr2018-03-31sec_edgar
cashflow_financing{"amount": -2552000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2017-12-31sec_edgar
cashflow_financing{"amount": -2425000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2017-09-30sec_edgar
cashflow_financing{"amount": -2417000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2017-06-30sec_edgar
cashflow_financing{"amount": -1721000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2017-03-31sec_edgar
cashflow_financing{"amount": -78903000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2016-12-31sec_edgar
cashflow_financing{"amount": -68641000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2016-09-30sec_edgar
cashflow_financing{"amount": -9428000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2016-06-30sec_edgar
cashflow_financing{"amount": -6203000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2016-03-31sec_edgar
cashflow_financing{"amount": -22969000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2015-12-31sec_edgar
cashflow_financing{"amount": -18954000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2015-09-30sec_edgar
cashflow_financing{"amount": -13023000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2015-06-30sec_edgar
cashflow_financing{"amount": -8500000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2015-03-31sec_edgar
cashflow_financing{"amount": -12684000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu2014-12-31sec_edgar
cashflow_financing{"amount": -2257000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2014-09-30sec_edgar
cashflow_financing{"amount": -880000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr2014-06-30sec_edgar
cashflow_financing{"amount": 142000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2014-03-31sec_edgar
cashflow_financing{"amount": 1436000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr2013-12-31sec_edgar
cashflow_financing{"amount": 1572000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr2013-09-30sec_edgar
cashflow_financing{"amount": 1241000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr2013-06-30sec_edgar
cashflow_financing{"amount": 601000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2013-03-31sec_edgar
cashflow_financing{"amount": 468000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2012-12-31sec_edgar
cashflow_financing{"amount": 304000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2012-09-30sec_edgar
cashflow_financing{"amount": 272000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2012-06-30sec_edgar
cashflow_financing{"amount": 171000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2012-03-31sec_edgar
cashflow_financing{"amount": 51034000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2011-12-31sec_edgar
cashflow_financing{"amount": 50965000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur2011-09-30sec_edgar
cashflow_financing{"amount": 703000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2011-06-30sec_edgar
cashflow_financing{"amount": 332000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2011-03-31sec_edgar
cashflow_financing{"amount": 531000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2010-12-31sec_edgar
cashflow_financing{"amount": 217000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2010-09-30sec_edgar
cashflow_financing{"amount": 194000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2010-06-30sec_edgar
cashflow_financing{"amount": 30000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curren2010-03-31sec_edgar
cashflow_financing{"amount": 217000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre2009-12-31sec_edgar
cashflow_investing{"amount": 5085000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr2019-09-30sec_edgar
cashflow_investing{"amount": -7695000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2019-06-30sec_edgar
cashflow_investing{"amount": -9167000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2019-03-31sec_edgar
cashflow_investing{"amount": 33772000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2018-12-31sec_edgar
cashflow_investing{"amount": 34108000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2018-09-30sec_edgar
cashflow_investing{"amount": -19056000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2018-06-30sec_edgar
cashflow_investing{"amount": -4172000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2018-03-31sec_edgar
cashflow_investing{"amount": -32522000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2017-12-31sec_edgar
cashflow_investing{"amount": -10740000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2017-09-30sec_edgar
cashflow_investing{"amount": -8337000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2017-06-30sec_edgar
cashflow_investing{"amount": 1182000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr2017-03-31sec_edgar
cashflow_investing{"amount": 24469000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2016-12-31sec_edgar
cashflow_investing{"amount": 30291000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2016-09-30sec_edgar
cashflow_investing{"amount": 18014000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2016-06-30sec_edgar
cashflow_investing{"amount": 5295000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr2016-03-31sec_edgar
cashflow_investing{"amount": -9077000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2015-12-31sec_edgar
cashflow_investing{"amount": -13455000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2015-09-30sec_edgar
cashflow_investing{"amount": -7050000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2015-06-30sec_edgar
cashflow_investing{"amount": -10149000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2015-03-31sec_edgar
cashflow_investing{"amount": -28528000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2014-12-31sec_edgar
cashflow_investing{"amount": -28750000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2014-09-30sec_edgar
cashflow_investing{"amount": -36222000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2014-06-30sec_edgar
cashflow_investing{"amount": -41006000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2014-03-31sec_edgar
cashflow_investing{"amount": -30024000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2013-12-31sec_edgar
cashflow_investing{"amount": -17411000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2013-09-30sec_edgar
cashflow_investing{"amount": -31824000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2013-06-30sec_edgar
cashflow_investing{"amount": -18932000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2013-03-31sec_edgar
cashflow_investing{"amount": -14934000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2012-12-31sec_edgar
cashflow_investing{"amount": -6605000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur2012-09-30sec_edgar
cashflow_investing{"amount": -16423000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu2012-06-30sec_edgar