Organization record
RUDOLPH TECHNOLOGIES INC
All evidence-backed facts for this organization, identity resolved across official registers.
Facts on record
Newest first; every row links to its evidence page.
| Fact | Value | Period | Source |
|---|---|---|---|
| accounts_payable | {"amount": 16981000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2018-12-31 | sec_edgar |
| accounts_payable | {"amount": 13471000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2017-12-31 | sec_edgar |
| accounts_payable | {"amount": 10245000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2016-12-31 | sec_edgar |
| accounts_payable | {"amount": 9094000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2015-12-31 | sec_edgar |
| accounts_payable | {"amount": 6843000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2014-12-31 | sec_edgar |
| accounts_payable | {"amount": 3095000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2013-12-31 | sec_edgar |
| accounts_payable | {"amount": 3932000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2012-12-31 | sec_edgar |
| accounts_payable | {"amount": 4439000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2011-12-31 | sec_edgar |
| accounts_payable | {"amount": 7864000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"} | 2010-12-31 | sec_edgar |
| accounts_receivable | {"amount": 63337000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-09-30 | sec_edgar |
| accounts_receivable | {"amount": 62142000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-06-30 | sec_edgar |
| accounts_receivable | {"amount": 66357000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2019-03-31 | sec_edgar |
| accounts_receivable | {"amount": 64194000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-12-31 | sec_edgar |
| accounts_receivable | {"amount": 68512000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-09-30 | sec_edgar |
| accounts_receivable | {"amount": 82555000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-06-30 | sec_edgar |
| accounts_receivable | {"amount": 74672000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2018-03-31 | sec_edgar |
| accounts_receivable | {"amount": 65283000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-12-31 | sec_edgar |
| accounts_receivable | {"amount": 66188000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-09-30 | sec_edgar |
| accounts_receivable | {"amount": 70564000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-06-30 | sec_edgar |
| accounts_receivable | {"amount": 61002000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2017-03-31 | sec_edgar |
| accounts_receivable | {"amount": 64912000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-12-31 | sec_edgar |
| accounts_receivable | {"amount": 74884000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-09-30 | sec_edgar |
| accounts_receivable | {"amount": 64576000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-06-30 | sec_edgar |
| accounts_receivable | {"amount": 64747000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2016-03-31 | sec_edgar |
| accounts_receivable | {"amount": 55492000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-12-31 | sec_edgar |
| accounts_receivable | {"amount": 61339000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-09-30 | sec_edgar |
| accounts_receivable | {"amount": 61185000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-06-30 | sec_edgar |
| accounts_receivable | {"amount": 51801000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2015-03-31 | sec_edgar |
| accounts_receivable | {"amount": 51603000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-12-31 | sec_edgar |
| accounts_receivable | {"amount": 49969000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-09-30 | sec_edgar |
| accounts_receivable | {"amount": 50811000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-06-30 | sec_edgar |
| accounts_receivable | {"amount": 42547000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2014-03-31 | sec_edgar |
| accounts_receivable | {"amount": 53437000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-12-31 | sec_edgar |
| accounts_receivable | {"amount": 58733000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-09-30 | sec_edgar |
| accounts_receivable | {"amount": 61065000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-06-30 | sec_edgar |
| accounts_receivable | {"amount": 52683000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2013-03-31 | sec_edgar |
| accounts_receivable | {"amount": 57113000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-12-31 | sec_edgar |
| accounts_receivable | {"amount": 61306000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-09-30 | sec_edgar |
| accounts_receivable | {"amount": 53174000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-06-30 | sec_edgar |
| accounts_receivable | {"amount": 38665000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2012-03-31 | sec_edgar |
| accounts_receivable | {"amount": 41036000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-12-31 | sec_edgar |
| accounts_receivable | {"amount": 39664000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-09-30 | sec_edgar |
| accounts_receivable | {"amount": 51240000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-06-30 | sec_edgar |
| accounts_receivable | {"amount": 54257000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2011-03-31 | sec_edgar |
| accounts_receivable | {"amount": 58814000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"} | 2010-12-31 | sec_edgar |
| capex | {"amount": 4201000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2019-09-30 | sec_edgar |
| capex | {"amount": 2654000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2019-06-30 | sec_edgar |
| capex | {"amount": 1320000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2019-03-31 | sec_edgar |
| capex | {"amount": 7542000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2018-12-31 | sec_edgar |
| capex | {"amount": 4127000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2018-09-30 | sec_edgar |
| capex | {"amount": 2178000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2018-06-30 | sec_edgar |
| capex | {"amount": 1442000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2018-03-31 | sec_edgar |
| capex | {"amount": 10210000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur | 2017-12-31 | sec_edgar |
| capex | {"amount": 7447000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2017-09-30 | sec_edgar |
| capex | {"amount": 5301000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2017-06-30 | sec_edgar |
| capex | {"amount": 1724000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2017-03-31 | sec_edgar |
| capex | {"amount": 3291000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2016-12-31 | sec_edgar |
| capex | {"amount": 2527000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2016-09-30 | sec_edgar |
| capex | {"amount": 2173000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2016-06-30 | sec_edgar |
| capex | {"amount": 1514000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2016-03-31 | sec_edgar |
| capex | {"amount": 3359000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2015-12-31 | sec_edgar |
| capex | {"amount": 2247000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2015-09-30 | sec_edgar |
| capex | {"amount": 1744000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2015-06-30 | sec_edgar |
| capex | {"amount": 1072000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2015-03-31 | sec_edgar |
| capex | {"amount": 2084000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2014-12-31 | sec_edgar |
| capex | {"amount": 1442000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2014-09-30 | sec_edgar |
| capex | {"amount": 1020000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2014-06-30 | sec_edgar |
| capex | {"amount": 390000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2014-03-31 | sec_edgar |
| capex | {"amount": 4880000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2013-12-31 | sec_edgar |
| capex | {"amount": 4002000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2013-09-30 | sec_edgar |
| capex | {"amount": 2485000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2013-06-30 | sec_edgar |
| capex | {"amount": 2528000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2013-03-31 | sec_edgar |
| capex | {"amount": 2429000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2012-12-31 | sec_edgar |
| capex | {"amount": 1283000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2012-09-30 | sec_edgar |
| capex | {"amount": 909000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2012-06-30 | sec_edgar |
| capex | {"amount": 505000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2012-03-31 | sec_edgar |
| capex | {"amount": 1622000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-12-31 | sec_edgar |
| capex | {"amount": 1366000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-09-30 | sec_edgar |
| capex | {"amount": 1159000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2011-06-30 | sec_edgar |
| capex | {"amount": 649000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2011-03-31 | sec_edgar |
| capex | {"amount": 4363000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2010-12-31 | sec_edgar |
| capex | {"amount": 3242000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr | 2010-09-30 | sec_edgar |
| capex | {"amount": 970000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2010-06-30 | sec_edgar |
| capex | {"amount": 677000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2010-03-31 | sec_edgar |
| capex | {"amount": 587000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre | 2009-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 139702000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2019-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 111958000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2019-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 100168000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2019-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 112388000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2018-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 124334000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2018-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 56491000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2018-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 68055000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2018-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 67770000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2017-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 68026000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2017-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 57705000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2017-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 52245000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2017-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 37859000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2016-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 38546000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2016-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 66439000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2016-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 38186000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2016-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 44554000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2015-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 32984000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2015-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 36735000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2015-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 35365000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2015-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 43114000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2014-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 47628000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2014-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 54658000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2014-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 55606000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2014-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 80790000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2013-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 83780000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2013-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 66792000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2013-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 85053000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2013-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 104253000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2012-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 105416000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2012-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 90020000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2012-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 89002000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2012-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 96671000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2011-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 133114000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currenc | 2011-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 88730000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2011-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 81127000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2011-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 71120000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2010-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 71922000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2010-09-30 | sec_edgar |
| cash_and_equivalents | {"amount": 66120000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2010-06-30 | sec_edgar |
| cash_and_equivalents | {"amount": 57715000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2010-03-31 | sec_edgar |
| cash_and_equivalents | {"amount": 57839000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2009-12-31 | sec_edgar |
| cash_and_equivalents | {"amount": 67735000, "concept": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "currency | 2008-12-31 | sec_edgar |
| cash_and_restricted_cash | {"amount": 139702000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa | 2019-09-30 | sec_edgar |
| cash_and_restricted_cash | {"amount": 112388000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa | 2018-12-31 | sec_edgar |
| cash_and_restricted_cash | {"amount": 124334000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCa | 2018-09-30 | sec_edgar |
| cash_and_restricted_cash | {"amount": 67770000, "concept": "us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCas | 2017-12-31 | sec_edgar |
| cashflow_financing | {"amount": -2332000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2019-09-30 | sec_edgar |
| cashflow_financing | {"amount": -2454000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2019-06-30 | sec_edgar |
| cashflow_financing | {"amount": -1342000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2019-03-31 | sec_edgar |
| cashflow_financing | {"amount": -23909000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2018-12-31 | sec_edgar |
| cashflow_financing | {"amount": -1585000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2018-09-30 | sec_edgar |
| cashflow_financing | {"amount": -1544000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2018-06-30 | sec_edgar |
| cashflow_financing | {"amount": -717000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr | 2018-03-31 | sec_edgar |
| cashflow_financing | {"amount": -2552000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2017-12-31 | sec_edgar |
| cashflow_financing | {"amount": -2425000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2017-09-30 | sec_edgar |
| cashflow_financing | {"amount": -2417000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2017-06-30 | sec_edgar |
| cashflow_financing | {"amount": -1721000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2017-03-31 | sec_edgar |
| cashflow_financing | {"amount": -78903000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2016-12-31 | sec_edgar |
| cashflow_financing | {"amount": -68641000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2016-09-30 | sec_edgar |
| cashflow_financing | {"amount": -9428000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2016-06-30 | sec_edgar |
| cashflow_financing | {"amount": -6203000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2016-03-31 | sec_edgar |
| cashflow_financing | {"amount": -22969000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2015-12-31 | sec_edgar |
| cashflow_financing | {"amount": -18954000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2015-09-30 | sec_edgar |
| cashflow_financing | {"amount": -13023000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2015-06-30 | sec_edgar |
| cashflow_financing | {"amount": -8500000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2015-03-31 | sec_edgar |
| cashflow_financing | {"amount": -12684000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cu | 2014-12-31 | sec_edgar |
| cashflow_financing | {"amount": -2257000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2014-09-30 | sec_edgar |
| cashflow_financing | {"amount": -880000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr | 2014-06-30 | sec_edgar |
| cashflow_financing | {"amount": 142000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2014-03-31 | sec_edgar |
| cashflow_financing | {"amount": 1436000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr | 2013-12-31 | sec_edgar |
| cashflow_financing | {"amount": 1572000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr | 2013-09-30 | sec_edgar |
| cashflow_financing | {"amount": 1241000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curr | 2013-06-30 | sec_edgar |
| cashflow_financing | {"amount": 601000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2013-03-31 | sec_edgar |
| cashflow_financing | {"amount": 468000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2012-12-31 | sec_edgar |
| cashflow_financing | {"amount": 304000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2012-09-30 | sec_edgar |
| cashflow_financing | {"amount": 272000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2012-06-30 | sec_edgar |
| cashflow_financing | {"amount": 171000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2012-03-31 | sec_edgar |
| cashflow_financing | {"amount": 51034000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2011-12-31 | sec_edgar |
| cashflow_financing | {"amount": 50965000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "cur | 2011-09-30 | sec_edgar |
| cashflow_financing | {"amount": 703000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2011-06-30 | sec_edgar |
| cashflow_financing | {"amount": 332000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2011-03-31 | sec_edgar |
| cashflow_financing | {"amount": 531000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2010-12-31 | sec_edgar |
| cashflow_financing | {"amount": 217000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2010-09-30 | sec_edgar |
| cashflow_financing | {"amount": 194000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2010-06-30 | sec_edgar |
| cashflow_financing | {"amount": 30000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curren | 2010-03-31 | sec_edgar |
| cashflow_financing | {"amount": 217000, "concept": "us-gaap:NetCashProvidedByUsedInFinancingActivities", "curre | 2009-12-31 | sec_edgar |
| cashflow_investing | {"amount": 5085000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr | 2019-09-30 | sec_edgar |
| cashflow_investing | {"amount": -7695000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2019-06-30 | sec_edgar |
| cashflow_investing | {"amount": -9167000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2019-03-31 | sec_edgar |
| cashflow_investing | {"amount": 33772000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2018-12-31 | sec_edgar |
| cashflow_investing | {"amount": 34108000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2018-09-30 | sec_edgar |
| cashflow_investing | {"amount": -19056000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2018-06-30 | sec_edgar |
| cashflow_investing | {"amount": -4172000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2018-03-31 | sec_edgar |
| cashflow_investing | {"amount": -32522000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2017-12-31 | sec_edgar |
| cashflow_investing | {"amount": -10740000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2017-09-30 | sec_edgar |
| cashflow_investing | {"amount": -8337000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2017-06-30 | sec_edgar |
| cashflow_investing | {"amount": 1182000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr | 2017-03-31 | sec_edgar |
| cashflow_investing | {"amount": 24469000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2016-12-31 | sec_edgar |
| cashflow_investing | {"amount": 30291000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2016-09-30 | sec_edgar |
| cashflow_investing | {"amount": 18014000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2016-06-30 | sec_edgar |
| cashflow_investing | {"amount": 5295000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "curr | 2016-03-31 | sec_edgar |
| cashflow_investing | {"amount": -9077000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2015-12-31 | sec_edgar |
| cashflow_investing | {"amount": -13455000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2015-09-30 | sec_edgar |
| cashflow_investing | {"amount": -7050000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2015-06-30 | sec_edgar |
| cashflow_investing | {"amount": -10149000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2015-03-31 | sec_edgar |
| cashflow_investing | {"amount": -28528000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2014-12-31 | sec_edgar |
| cashflow_investing | {"amount": -28750000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2014-09-30 | sec_edgar |
| cashflow_investing | {"amount": -36222000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2014-06-30 | sec_edgar |
| cashflow_investing | {"amount": -41006000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2014-03-31 | sec_edgar |
| cashflow_investing | {"amount": -30024000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2013-12-31 | sec_edgar |
| cashflow_investing | {"amount": -17411000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2013-09-30 | sec_edgar |
| cashflow_investing | {"amount": -31824000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2013-06-30 | sec_edgar |
| cashflow_investing | {"amount": -18932000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2013-03-31 | sec_edgar |
| cashflow_investing | {"amount": -14934000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2012-12-31 | sec_edgar |
| cashflow_investing | {"amount": -6605000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cur | 2012-09-30 | sec_edgar |
| cashflow_investing | {"amount": -16423000, "concept": "us-gaap:NetCashProvidedByUsedInInvestingActivities", "cu | 2012-06-30 | sec_edgar |