FACTANKER

AXCELIS TECHNOLOGIES INC

CIK 0001113232

Zeitreihen: Revenue nach Geschäftsjahr · Net Income nach Geschäftsjahr

FaktWertZeitQuelle
accounts_payable{"amount": 58807000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2026-06-30sec_edgar
accounts_payable{"amount": 51558000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2026-03-31sec_edgar
accounts_payable{"amount": 42309000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2025-12-31sec_edgar
accounts_payable{"amount": 52466000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2025-09-30sec_edgar
accounts_payable{"amount": 37111000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2025-06-30sec_edgar
accounts_payable{"amount": 38985000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2025-03-31sec_edgar
accounts_payable{"amount": 46928000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2024-12-31sec_edgar
accounts_payable{"amount": 54047000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2024-09-30sec_edgar
accounts_payable{"amount": 45782000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2024-06-30sec_edgar
accounts_payable{"amount": 39853000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2024-03-31sec_edgar
accounts_payable{"amount": 54400000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2023-12-31sec_edgar
accounts_payable{"amount": 60061000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2023-09-30sec_edgar
accounts_payable{"amount": 60504000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2023-06-30sec_edgar
accounts_payable{"amount": 60473000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2023-03-31sec_edgar
accounts_payable{"amount": 62346000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2022-12-31sec_edgar
accounts_payable{"amount": 54020000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2022-09-30sec_edgar
accounts_payable{"amount": 49410000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2022-06-30sec_edgar
accounts_payable{"amount": 50759000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2022-03-31sec_edgar
accounts_payable{"amount": 38025000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2021-12-31sec_edgar
accounts_payable{"amount": 35499000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2021-09-30sec_edgar
accounts_payable{"amount": 40695000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2021-06-30sec_edgar
accounts_payable{"amount": 40476000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2021-03-31sec_edgar
accounts_payable{"amount": 24013000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2020-12-31sec_edgar
accounts_payable{"amount": 24260000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2020-09-30sec_edgar
accounts_payable{"amount": 30270000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2020-06-30sec_edgar
accounts_payable{"amount": 26089000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2020-03-31sec_edgar
accounts_payable{"amount": 25341000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2019-12-31sec_edgar
accounts_payable{"amount": 21320000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2019-09-30sec_edgar
accounts_payable{"amount": 21771000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2019-06-30sec_edgar
accounts_payable{"amount": 29641000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2019-03-31sec_edgar
accounts_payable{"amount": 35955000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2018-12-31sec_edgar
accounts_payable{"amount": 27930000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2018-09-30sec_edgar
accounts_payable{"amount": 32633000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2018-06-30sec_edgar
accounts_payable{"amount": 43438000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2018-03-31sec_edgar
accounts_payable{"amount": 32642000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2017-12-31sec_edgar
accounts_payable{"amount": 33594000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2017-09-30sec_edgar
accounts_payable{"amount": 27606000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2017-06-30sec_edgar
accounts_payable{"amount": 26426000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2017-03-31sec_edgar
accounts_payable{"amount": 24996000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2016-12-31sec_edgar
accounts_payable{"amount": 20241000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2016-09-30sec_edgar
accounts_payable{"amount": 26836000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2016-06-30sec_edgar
accounts_payable{"amount": 21700000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2016-03-31sec_edgar
accounts_payable{"amount": 19849000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2015-12-31sec_edgar
accounts_payable{"amount": 24350000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2015-09-30sec_edgar
accounts_payable{"amount": 38849000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2015-06-30sec_edgar
accounts_payable{"amount": 30536000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2015-03-31sec_edgar
accounts_payable{"amount": 21605000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2014-12-31sec_edgar
accounts_payable{"amount": 14699000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2014-09-30sec_edgar
accounts_payable{"amount": 17379000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2014-06-30sec_edgar
accounts_payable{"amount": 17865000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2014-03-31sec_edgar
accounts_payable{"amount": 19451000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2013-12-31sec_edgar
accounts_payable{"amount": 16075000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2013-09-30sec_edgar
accounts_payable{"amount": 16188000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2013-06-30sec_edgar
accounts_payable{"amount": 13793000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2013-03-31sec_edgar
accounts_payable{"amount": 10166000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2012-12-31sec_edgar
accounts_payable{"amount": 11683000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2012-09-30sec_edgar
accounts_payable{"amount": 17642000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2012-06-30sec_edgar
accounts_payable{"amount": 17861000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2012-03-31sec_edgar
accounts_payable{"amount": 19551000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2011-12-31sec_edgar
accounts_payable{"amount": 17703000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2011-09-30sec_edgar
accounts_payable{"amount": 30904000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2011-06-30sec_edgar
accounts_payable{"amount": 36709000, "concept": "us-gaap:AccountsPayableCurrent", "currency": "USD"}2010-12-31sec_edgar
accounts_receivable{"amount": 154149000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2026-06-30sec_edgar
accounts_receivable{"amount": 161814000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2026-03-31sec_edgar
accounts_receivable{"amount": 168479000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2025-12-31sec_edgar
accounts_receivable{"amount": 147636000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2025-09-30sec_edgar
accounts_receivable{"amount": 138841000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2025-06-30sec_edgar
accounts_receivable{"amount": 164949000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2025-03-31sec_edgar
accounts_receivable{"amount": 203149000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2024-12-31sec_edgar
accounts_receivable{"amount": 183543000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2024-09-30sec_edgar
accounts_receivable{"amount": 188080000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2024-06-30sec_edgar
accounts_receivable{"amount": 208544000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2024-03-31sec_edgar
accounts_receivable{"amount": 217964000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2023-12-31sec_edgar
accounts_receivable{"amount": 192327000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2023-09-30sec_edgar
accounts_receivable{"amount": 159199000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2023-06-30sec_edgar
accounts_receivable{"amount": 189597000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2023-03-31sec_edgar
accounts_receivable{"amount": 169773000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2022-12-31sec_edgar
accounts_receivable{"amount": 173893000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2022-09-30sec_edgar
accounts_receivable{"amount": 146120000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2022-06-30sec_edgar
accounts_receivable{"amount": 118987000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2022-03-31sec_edgar
accounts_receivable{"amount": 104410000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"2021-12-31sec_edgar
accounts_receivable{"amount": 78257000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2021-09-30sec_edgar
accounts_receivable{"amount": 79544000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2021-06-30sec_edgar
accounts_receivable{"amount": 75932000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2021-03-31sec_edgar
accounts_receivable{"amount": 86865000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2020-12-31sec_edgar
accounts_receivable{"amount": 45161000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2020-09-30sec_edgar
accounts_receivable{"amount": 64909000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2020-06-30sec_edgar
accounts_receivable{"amount": 64238000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2020-03-31sec_edgar
accounts_receivable{"amount": 83753000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-12-31sec_edgar
accounts_receivable{"amount": 49046000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-09-30sec_edgar
accounts_receivable{"amount": 62279000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-06-30sec_edgar
accounts_receivable{"amount": 70947000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2019-03-31sec_edgar
accounts_receivable{"amount": 78727000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-12-31sec_edgar
accounts_receivable{"amount": 84977000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-09-30sec_edgar
accounts_receivable{"amount": 74429000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-06-30sec_edgar
accounts_receivable{"amount": 75588000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2018-03-31sec_edgar
accounts_receivable{"amount": 75302000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-12-31sec_edgar
accounts_receivable{"amount": 69835000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-09-30sec_edgar
accounts_receivable{"amount": 48561000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-06-30sec_edgar
accounts_receivable{"amount": 67083000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2017-03-31sec_edgar
accounts_receivable{"amount": 50573000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-12-31sec_edgar
accounts_receivable{"amount": 44993000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-09-30sec_edgar
accounts_receivable{"amount": 63482000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-06-30sec_edgar
accounts_receivable{"amount": 47471000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2016-03-31sec_edgar
accounts_receivable{"amount": 36868000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-12-31sec_edgar
accounts_receivable{"amount": 38674000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-09-30sec_edgar
accounts_receivable{"amount": 42002000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-06-30sec_edgar
accounts_receivable{"amount": 42753000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2015-03-31sec_edgar
accounts_receivable{"amount": 42794000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-12-31sec_edgar
accounts_receivable{"amount": 29904000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-09-30sec_edgar
accounts_receivable{"amount": 32067000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-06-30sec_edgar
accounts_receivable{"amount": 38121000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2014-03-31sec_edgar
accounts_receivable{"amount": 36587000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-12-31sec_edgar
accounts_receivable{"amount": 29321000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-09-30sec_edgar
accounts_receivable{"amount": 30220000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-06-30sec_edgar
accounts_receivable{"amount": 23150000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2013-03-31sec_edgar
accounts_receivable{"amount": 24843000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-12-31sec_edgar
accounts_receivable{"amount": 24978000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-09-30sec_edgar
accounts_receivable{"amount": 34978000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-06-30sec_edgar
accounts_receivable{"amount": 30464000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2012-03-31sec_edgar
accounts_receivable{"amount": 35071000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-12-31sec_edgar
accounts_receivable{"amount": 39881000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-09-30sec_edgar
accounts_receivable{"amount": 57969000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2011-06-30sec_edgar
accounts_receivable{"amount": 57888000, "concept": "us-gaap:AccountsReceivableNetCurrent", "currency": "USD"}2010-12-31sec_edgar
capex{"amount": 5393000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2026-06-30sec_edgar
capex{"amount": 1839000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2026-03-31sec_edgar
capex{"amount": 11295000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2025-12-31sec_edgar
capex{"amount": 8960000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2025-09-30sec_edgar
capex{"amount": 6945000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2025-06-30sec_edgar
capex{"amount": 4960000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2025-03-31sec_edgar
capex{"amount": 12181000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2024-12-31sec_edgar
capex{"amount": 7523000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2024-09-30sec_edgar
capex{"amount": 3624000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2024-06-30sec_edgar
capex{"amount": 1620000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2024-03-31sec_edgar
capex{"amount": 20656000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2023-12-31sec_edgar
capex{"amount": 10503000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2023-09-30sec_edgar
capex{"amount": 5202000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2023-06-30sec_edgar
capex{"amount": 2240000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2023-03-31sec_edgar
capex{"amount": 10683000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2022-12-31sec_edgar
capex{"amount": 6876000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2022-09-30sec_edgar
capex{"amount": 3356000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2022-06-30sec_edgar
capex{"amount": 1503000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2022-03-31sec_edgar
capex{"amount": 8718000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2021-12-31sec_edgar
capex{"amount": 5701000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2021-09-30sec_edgar
capex{"amount": 2392000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2021-06-30sec_edgar
capex{"amount": 1347000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2021-03-31sec_edgar
capex{"amount": 7434000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2020-12-31sec_edgar
capex{"amount": 5567000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2020-09-30sec_edgar
capex{"amount": 2975000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2020-06-30sec_edgar
capex{"amount": 1290000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2020-03-31sec_edgar
capex{"amount": 11969000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2019-12-31sec_edgar
capex{"amount": 11064000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "cur2019-09-30sec_edgar
capex{"amount": 8757000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2019-06-30sec_edgar
capex{"amount": 4255000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2019-03-31sec_edgar
capex{"amount": 4715000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-12-31sec_edgar
capex{"amount": 3852000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-09-30sec_edgar
capex{"amount": 1675000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2018-06-30sec_edgar
capex{"amount": 723000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2018-03-31sec_edgar
capex{"amount": 7285000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-12-31sec_edgar
capex{"amount": 6910000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-09-30sec_edgar
capex{"amount": 1849000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-06-30sec_edgar
capex{"amount": 1116000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2017-03-31sec_edgar
capex{"amount": 2506000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-12-31sec_edgar
capex{"amount": 2261000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-09-30sec_edgar
capex{"amount": 1859000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-06-30sec_edgar
capex{"amount": 1275000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2016-03-31sec_edgar
capex{"amount": 1830000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-12-31sec_edgar
capex{"amount": 1329000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curr2015-09-30sec_edgar
capex{"amount": 672000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2015-06-30sec_edgar
capex{"amount": 320000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2015-03-31sec_edgar
capex{"amount": 896000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2014-12-31sec_edgar
capex{"amount": 710000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2014-09-30sec_edgar
capex{"amount": 567000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2014-06-30sec_edgar
capex{"amount": 227000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2014-03-31sec_edgar
capex{"amount": 821000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2013-12-31sec_edgar
capex{"amount": 484000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2013-09-30sec_edgar
capex{"amount": 336000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2013-06-30sec_edgar
capex{"amount": 150000, "concept": "us-gaap:PaymentsToAcquirePropertyPlantAndEquipment", "curre2013-03-31sec_edgar
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